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闪光灯退火:从基础到应用-Flash Lamp Annealing: From Basics to Applications文件编号:1184

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标题(title):Flash Lamp Annealing: From Basics to Applications
闪光灯退火:从基础到应用
作者(author):Lars Rebohle, Slawomir Prucnal, Denise Reichel
出版社(publisher):Springer International Publishing
大小(size):13 MB (13571251 bytes)
格式(extension):pdf
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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.


Table of contents :
Front Matter ....Pages i-xviii
Introduction (Lars Rebohle)....Pages 1-14
The Technology of Flash Lamp Annealing (Lars Rebohle)....Pages 15-70
Process Management (Lars Rebohle, Denise Reichel)....Pages 71-129
Semiconductor Applications (Slawomir Prucnal, Lars Rebohle, Denise Reichel)....Pages 131-232
Beyond Semiconductors (Slawomir Prucnal, Lars Rebohle, Denise Reichel)....Pages 233-282
Back Matter ....Pages 283-288

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